Qadarka ugu badan ee Gaaska Gaarka ah ee Elektarooniga ah – Nitrogen Trifluoride NF3

Warshadaha semiconductor ee dalkeena iyo warshadaha guddiyadu waxay ilaalinayaan barwaaqada heerka sare ah. Nitrogen trifluoride, sida gaaska elektaroonigga ah ee khaaska ah ee lama huraanka ah uguna weyn ee soo saarista iyo habaynta muraayadaha iyo semiconductors, waxay leedahay meel suuq ah oo ballaaran.

Gaasaska gaarka ah ee elektiroonigga ah ee sida caadiga ah loo isticmaalo fluorine-ka waxaa ka mid ahsulfur hexafluoride (SF6), tungsten hexafluoride (WF6),Kaarboon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) iyo octafluoropropane (C3F8). Nitrojiin trifluoride (NF3) waxaa inta badan loo isticmaalaa il fluorine ahaan hydrogen fluoride-fluoride gaaska tamarta sare leh lasers kiimikaad. Qaybta wax ku oolka ah (qiyaastii 25%) tamarta falcelinta ee u dhaxaysa H2-O2 iyo F2 waxaa lagu sii dayn karaa shucaaca laysarka, markaa HF-OF lasers ayaa ah kuwa ugu rajo-gelinta badan laser-ka kiimikada.

Nitrogen trifluoride waa gaaska etching balaasmaha ugu fiican ee warshadaha microelectronics. Silikoon iyo silikoon nitride etching, nitrogen trifluoride waxay leedahay heer ka sarreeya etching iyo xulashada ka carbon tetrafluoride iyo isku dar ah tetrafluoride carbon iyo oxygen, oo aan lahayn wasakh dusha sare. Gaar ahaan xoqidda qalabka wareegga isku dhafan ee leh dhumuc ka yar 1.5um, nitrogen trifluoride wuxuu leeyahay heer aad u fiican oo la isku qurxiyo iyo xulashada, oo aan ka tagin wax hadhaaga ah ee dusha sare ee shayga xardhan, sidoo kale waa wakiil nadiif ah oo aad u wanaagsan. Iyadoo horumarinta nanotechnology iyo horumarinta baaxadda leh ee warshadaha elektiroonigga ah, baahideeda ayaa kordhin doonta maalinba maalinta ka dambeysa.

Nooc ka mid ah gaaska khaaska ah ee fluorine ku jira, nitrogen trifluoride (NF3) waa gaaska khaaska ah ee ugu weyn ee suuqa. Waa mid kimikal ahaan aan firfircoonayn heerkulka qolka, aad uga firfircoon yahay ogsijiinta, way ka xasilloon tahay fluorine, waana sahlan tahay in lagu maareeyo heerkulka sare.

Nitrogen trifluoride waxaa inta badan loo isticmaalaa sida gaaska etching plasma iyo wakiilka nadiifinta qolka falcelinta, ku haboon beeraha wax soo saarka sida chips semiconductor, bandhigay panel flat, fiber indhaha, unugyada photovoltaic, iwm.

Marka la barbardhigo gaaska kale ee fluorine-ka ku jira, nitrogen trifluoride waxay leedahay faa'iidooyinka falcelinta degdegga ah iyo waxtarka sare leh, gaar ahaan soo saarista walxaha silikoon-ku jira sida silicon nitride, waxay leedahay heer sare oo etching ah iyo xulashada, oo aan ka tagin wax hadhaaga dusha sare ee shayga xardhan, sidoo kale waa mid aad u wanaagsan wakiilka nadiifinta dusha sare, waana mid aan wasakhayn karin.