Qaddarka ugu weyn ee gaaska khaaska ah ee elektiroonigga ah - nitrogen trifluoride nf3

Warshadahayaga Semiconductor ee dalka ee Semiconductor iyo warshadaha guddiga ayaa joogsada heer barwaaqo ah. Nitrogen Trifluoride, oo ah gaas khaso-wacan oo ah gaaska elektiroonigga ah ee khaaska ah ee wax soo saarka iyo ka baaraandegista suumanka iyo semicontucters, waxay leedahay meel suuq weyn leh.

Caadi ahaan-ka-qabashada galleyda-sida caadiga ah ee gaaska elektaroonigga ah waxaa ka mid ahSulfur Hexafluoride (SF6), Tungsten Hexafluoride (WF6),kaarboon tetrnluoride (cf4), trifluoromethane (CHF3), nitrogen Trifluoride (NF3), Hexafluorothethane (C2F6) iyo Octafluoropropane (C3F8). Nitrogen Trifluoride (NF3) waxaa inta badan loo isticmaalaa ilo forrorine ah oo loogu talagalay hydrogen foloride-fluoride gaaska tamarta sare ee tamarta leh. Qeybta waxtarka leh (qiyaastii 25%) ee falcelinta tamarta ee udhaxeysa H2-O2 iyo F2 waxaa lagu siidaayaa shucaac laser, sidaa darteed HF-offers waa lasers lass-ka ugu ba'an ee kiimikada kiimikada.

Nitrogen Trifluoride waa plasma plasma oo fiican gaas gaaska wershadaha microroektonics-ka. Wicitaanka silicon iyo Silicon Nitride, Nitrogen Trifluolide ayaa leh heer sare iyo xulasho ka badan kaarboon tetnbonluide iyo isku dar ah kaarboon tetnbonluide iyo oksijiin, oo aan wasakhaysaneyn dusha sare. Gaar ahaan ku-dhex-dhexaadka agab isku-dhafan oo leh dhumuc ka yar 1.5um, nitrogen Trifluode ayaa leh heerar aad u fiican oo korantada ah iyo xulasho, oo aan lahayn hadhka dushiisa ee dusha sare, sidoo kalena waa wakiil nadaafadda oo aad u wanaagsan. Iyadoo la horumarinayo horumarka nanotechnology iyo horumarka baaxadda weyn ee warshadaha elektiroonigga ah, dalabnimadeeda ayaa ku kordhin doonta maalinba maalinta ka dambeysa.

Sida nooc ka mid ah fluorinine-gu gaar ah gaaska gaarka ah, nitrogen trifluoride (NF3) waa badeecada gaaska ee gaaska ee ugu weyn suuqa. Waxaa si kedis ah ugu dhexjira heerkulka qolka, oo ka firfircoon oksijiinka, oo ka xasilloon ka badan forindka, waana fududahay in la maareeyo heerkulka sare.

Nitrogen Trifluoride waxaa inta badan loo isticmaalaa sidii plasma corcing gaaska nadiifinta gaaska iyo fadeexayaasha ee loo yaqaan 'plaspining', oo ah soosaarid aqallo ah sida chinathor-ka semiconductor.

Marka la barbar dhigo gaasas kale oo elektiroonig ah, nitrogen Trifluoride ayaa leh faa'iidooyinka falcelinta degdega ah iyo hufnaan sare, gaar ahaan in siliclul ka kooban walxaha ka kooban silicon-ka ah, sidoo kalena aysan ahayn mid aad u wanaagsan oo nadaafadda ah, oo ay ku qanci karto baahida habka howsha.