Tirada ugu Badan ee Gaaska Gaarka ah ee Elektarooniga ah - Nitrogen Trifluoride NF3

Warshadaha semiconductor-ka iyo warshadaha panel-ka ee dalkeenna waxay ilaaliyaan heer sare oo barwaaqo ah. Nitrogen trifluoride, oo ah gaas elektaroonik ah oo aan laga maarmi karin oo mugga ugu badan leh marka la soo saarayo laguna farsameynayo panel-yada iyo semiconductor-yada, waxay leedahay suuq ballaaran.

Gaasaska elektaroonigga ah ee gaarka ah ee ay ku jirto fluorine-ka waxaa ka mid ahsulfur hexafluoride (SF6), tungsten hexafluoride (WF6),kaarboon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) iyo octafluoropropane (C3F8). Nitrogen trifluoride (NF3) waxaa inta badan loo isticmaalaa sidii ilo fluorine ah oo loogu talagalay laysarka kiimikada ee tamarta sare leh ee gaaska hydrogen fluoride-fluoride. Qaybta wax ku oolka ah (qiyaastii 25%) ee tamarta falgalka ee u dhaxaysa H2-O2 iyo F2 waxaa lagu sii deyn karaa shucaaca laysarka, sidaa darteed laysarka HF-OF waa laysarka ugu rajada badan laysarka kiimikada.

Nitrogen trifluoride waa gaas balaasma ah oo aad u fiican warshadaha microelectronics-ka. Si loo sameeyo silicon iyo silicon nitride, nitrogen trifluoride waxay leedahay heer sare oo wax lagu qoro iyo kala-soocid ah marka loo eego tetrafluoride kaarboon iyo isku-darka tetrafluoride kaarboon iyo oksijiin, mana laha wax wasakh ah oo dusha sare ah. Gaar ahaan marka la qorayo walxaha wareegga isku dhafan ee dhumucdoodu ka yar tahay 1.5um, nitrogen trifluoride waxay leedahay heer aad u fiican oo wax lagu qoro iyo kala-soocid ah, iyadoo aan wax haraag ah ka tagin dusha sare ee shayga la xardhay, sidoo kale waa wakiil nadiifin oo aad u wanaagsan. Iyadoo la horumarinayo nanotechnology iyo horumarka baaxadda leh ee warshadaha elektaroonigga ah, baahideedu way sii kordheysaa maalinba maalinta ka dambeysa.

Nooc ka mid ah gaaska gaarka ah ee ay ku jirto fluorine, nitrogen trifluoride (NF3) waa badeecada gaaska gaarka ah ee elektaroonigga ah ee ugu weyn suuqa. Waa mid kiimiko ahaan aan firfircoonayn heerkulka qolka, ka firfircoon oksijiinta, ka xasilloon fluorine, waana mid si fudud loo maareyn karo heerkulka sare.

Nitrogen trifluoride waxaa inta badan loo isticmaalaa gaaska balaasmaha iyo wakiilka nadiifinta qolka falcelinta, oo ku habboon beeraha wax soo saarka sida jajabyada semiconductor-ka, bandhigyada guddiyada fidsan, fiilooyinka indhaha, unugyada sawir-qaadista, iwm.

Marka la barbardhigo gaasaska elektaroonigga ah ee kale ee fluorine-ka ku jira, nitrogen trifluoride waxay leedahay faa'iidooyinka falcelinta degdegga ah iyo hufnaanta sare, gaar ahaan marka la qorayo walxaha silicon-ka ku jira sida silicon nitride, waxay leedahay heer sare oo xoqid iyo xulasho, iyadoo aan wax haraag ah ka tagin dusha sare ee shayga la xardhay, waana sidoo kale wakiil nadiifin oo aad u wanaagsan, mana aha mid wasakheynaya dusha sare waxayna dabooli kartaa baahiyaha habka farsamaynta.