Haydarojiin koloriidwaa gaas aan midab lahayn oo leh ur daran. Xalkeeda biyaha waxaa loo yaqaan hydrochloric acid, oo sidoo kale loo yaqaan hydrochloric acid. Hydrogen chloride aad ayuu ugu milmaa biyaha. Heerkulka 0°C, 1 mug oo biyo ah ayaa milmi kara qiyaastii 500 mug oo hydrogen chloride ah.

Waxay leedahay sifooyinka iyo astaamaha soo socda:

1. Nadiifnimo sare

Daahirnimada fasalka elektaroonigga ahhaydarojiin koloriidaad ayuu u sarreeyaa, badanaa ppm ama heer hoose, si loo hubiyo in aan wax wasakh ah lagu soo darin habka wax soo saarka semiconductor-ka.

2. Dabacsanaan la'aan

Waa gaas kiimiko ahaan aan firfircoonayn oo aan la falgalin walxo kale oo badan, taas oo aad muhiim u ah si looga hortago wasakhowga agabka iyo qalabka semiconductor-ka.

3. Xasillooni sare

Darajada elektaroonigga ahhaydarojiin koloriidguud ahaan waxay leedahay kiimiko deggan si loo hubiyo habaynta semiconductor-ka ee la isku halleyn karo.

Habka semiconductor-ka, codsiyada ugu muhiimsan ee hydrogen chloride-ka heerka elektaroonigga ah waxaa ka mid ah:

1. Nadiifinta dusha sare iyo diyaarinta

Sida nadiifiye dusha sare oo hufan, heer elektaroonik ahhaydarojiin koloriidwaxaa loo isticmaalaa in laga saaro oksaydhyada iyo wasakhda dusha sare ee substrate-ka si loo hubiyo tayada iyo daahirnimada lakabka epitaxial ama filimka.

2. Gargaarka koritaanka epitaxial

Waxaa loo isticmaalaa sidii wakiil daaweyn dusha sare ah habka epitaxial-ka, waxay ka caawisaa hagaajinta tayada lakabka epitaxial-ka, hagaajinta isku-dhafka shaatiyada, iyo yaraynta sameynta cilladaha shaatiyada.

3. Daaweynta ka hor

Kahor diyaarinta aaladaha semiconductor-ka, heerka elektaroonigga ahhaydarojiin koloriidwaxaa loo isticmaali karaa in lagu daaweeyo dusha sare ee substrate-ka si loo sameeyo saldhig deggan si loo hagaajiyo isku-dhejinta u dhaxaysa lakabka epitaxial iyo substrate-ka.

4. Wakiilka kaaliyaha dhigista

Inta lagu jiro habka kaydinta uumiga kiimikada (CVD) ama kaydinta uumiga jireed (PVD), haydarojiin chloride heerka elektaroonigga ah ayaa loo isticmaali karaa sidii dhexdhexaad gaas ah si looga qaybqaato falcelinta dhigista walxaha semiconductor-ka.

5. Wakiilka wareejinta wejiga gaaska

Iyada oo ah wakiil wareejin ah oo gaas ah, waxyaabo kale oo hor-u-qaad ah oo gaas ah ayaa lagu soo bandhigaa qolka falcelinta si loo hagaajiyo heerka dhigista iyo isku-midnimada walxaha.

Astaamahani waxay sameeyaan darajada elektaroonigga ahhaydarojiin koloriidwakiil muhiim ah oo wax ka beddelka tignoolajiyada semiconductor-ka, kaas oo saameyn muhiim ah ku leh waxqabadka iyo isku halaynta qalabka kama dambaysta ah.

Marka laga soo tago isticmaalkeeda habaynta semiconductor-ka, hydrogen chloride-ka heerka elektaroonigga ah wuxuu ka heli karaa isticmaallo kala duwan meelaha kale, oo ay ku jiraan: Diyaarinta agabka saafiga ah ee sare, Unugyada Shidaalka, koritaanka walxaha Semiconductor-ka, Lithography-ga Marxaladda Uumiga, Falanqaynta Maaddada, Cilmi-baarista Kiimikada.

Guud ahaan, fasalka elektaroonigga ahhaydarojiin koloriidwaa gaas saafi ah oo badan oo leh adeegyo kala duwan oo ka baxsan wax soo saarka semiconductor-ka.