Eitaxial (koritaan)Isku dhafan GAs

Gudaha warshadaha semiconductor, gaaska loo isticmaalay in lagu beero hal ama in ka badan oo lakab ah oo shey uumiga kiimikada kiimikada ah ee ku saabsan substrate si taxaddar leh loo xushay waxaa loo yaqaanaa gaaska cabaad.

Gaamista silicoonka ee silicooska ah ee silicooska ah waxaa ka mid ah dichlorosilane, silicon tetrachloride iyosine. Badanaa loo isticmaalo dhigashada 'Eiscaaxislicon Silicon', dhisitirka filim filim oo Silicon ah, guntin filim, amorophous silicon silicons iyo sawir-qaade kale, iwm.

Dejisida uumiga kiimikada (CVD) gaas isku dhafan

CVD waa hab lagu dhinto waxyaabo gaar ah iyo xeryo ay sameeyaan jawaabta kiimikada gaaska iyadoo la adeegsanayo xeryahooda kacsan, ie, hablo qaab dhismeedka filimka ah oo adeegsanaya jawaab celinta kiimikada gaaska. Iyada oo ku xidhan nooca filimka la sameeyay, gaaska uumiga kiimikada (CVD) ee loo adeegsaday ayaa sidoo kale ka duwan.

DafinGaas isku dhafan

In soo saarista aaladaha semiconductor iyo wareegga isku dhafan, cilado gaar ah ayaa loo rogay waxyaabo semiconductor ah si loo siiyo qalabka nooca loo baahan yahay ee la-talinta, ee la gado, iwm

Inta badan waxaa ku jira mid arxan leh, perospherus trifluoride, pentafluodide, pentafluoride, sunta arsenic trifluoride, pentafluoride,Boron Trifluoride, Diborane, iwm.

Badanaa, isha isku-darka ayaa lagu qasay gaas side (sida argogen iyo nitrogen) oo ka tirsan golaha wasiirada. Ka dib markii la isku daro, qulqulka gaaska ayaa si joogto ah loogu duraa foornada kala-goynta ah oo ku wareegsan xargaha, oo dhigaya xargaha dusha sare ee xaydha, ka dibna ay ka falceliyaan silikon si loo soo saaro biraha shiidan ee silikoon loo maro.

IingiridGaasta isku dar ah

Etching waa in itch dusha sare ee ka shaqeynta (sida filimka birta ah, sida filimka birta, filimka silicon octort, iwm) oo aan lahayn shaashadda shaandhaynta, si loo helo qaabka sawir-qaadista, si loo helo qaabka sawirka loo baahan yahay.

Qaababka iskoolka waxaa ka mid ah kiimikada kiimikada qoyan iyo cuncunka kiimikada qallalan. Gaaska loo isticmaalay in lagu isticmaalo kiimikada kiimikada qallalan waxaa loo yaqaan gaaska.

Gas-galka Gas-ga badanaa waa gaas fluoride ah (kala fog), sidakaarboon tetrnafluoride, nitrogen trifluoride, trifluoromethane, hexafluoroethane, Pervluorothopane, iwm.